Inventor · disambiguated record
Klaus Petry
Also filed as: PETRY KLAUS
17 granted patents·3 pending applications·251 citations·filing 1995–2023
92Inventor score
Files withAXCELIS TECH INC5AHLGREN RALPH B3VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3APPLIED MATERIALS INC1BECKER KLAUS1
Top patents by PatentIndex Score
20 records- 0187US5695396AVentilating system for reducing contaminations in the air of an aircraftDAIMLER BENZ AEROSPACE AIRBUS·Filed 1996·Granted Dec 9, 1997·92 cites·21 claims
- 0285US9933314B2Semiconductor workpiece temperature measurement systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Apr 3, 2018·3 cites·11 claims
- 0385US6992309B1Ion beam measurement systems and methods for ion implant dose and uniformity controlAXCELIS TECH INC·Filed 2004·Granted Jan 31, 2006·34 cites·37 claims
- 0483US5545084AMethod and apparatus for air conditioning two passenger decks of an aircraftDAIMIER BENZ AEROSPACE AIRBUS·Filed 1995·Granted Aug 13, 1996·82 cites·21 claims
- 0576US8722431B2FinFET device fabrication using thermal implantationPRADHAN NILAY ANIL·Filed 2012·Granted May 13, 2014·7 cites·20 claims
- 0676US8592786B2Platen clamping surface monitoringVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 26, 2013·3 cites·17 claims
- 0775US8531814B2Removal of charge between a substrate and an electrostatic clampSTONE DALE K·Filed 2010·Granted Sep 10, 2013·4 cites·8 claims
- 0873US7381969B2Load lock controlAXCELIS TECH INC·Filed 2006·Granted Jun 3, 2008·6 cites·11 claims
- 0969US7828504B2Combination load lock for handling workpiecesAXCELIS TECH INC·Filed 2006·Granted Nov 9, 2010·4 cites·19 claims
- 1069US6552892B2Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clampAXCELIS TECH INC·Filed 2001·Granted Apr 22, 2003·14 cites·22 claims
- 1163US8987639B2Electrostatic chuck with radiative heatingPETRY KLAUS·Filed 2012·Granted Mar 24, 2015·2 cites·16 claims
- 1259US10739208B2Semiconductor workpiece temperature measurement systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Aug 11, 2020·0 cites·14 claims
- 1355US2013160814A1Method for converting solar energyAHLGREN RALPH B·Filed 2013·Application pending·0 cites
- 1455US2025218722A1Multimode dose compensation systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1549US10770261B2System and method to monitor glitch energyVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Sep 8, 2020·0 cites·18 claims
- 1647US9029683B2Self-contained, multi-fluid energy conversion and management system for converting solar energy to electric and thermal energyAHLGREN RALPH B·Filed 2011·Granted May 12, 2015·0 cites·20 claims
- 1746US9103564B2Solar energy converter and method for converting solar energyAHLGREN RALPH B·Filed 2010·Granted Aug 11, 2015·0 cites·27 claims
- 1846US8766209B2Current limiter for high voltage power supply used with ion implantation systemBECKER KLAUS·Filed 2011·Granted Jul 1, 2014·0 cites·18 claims
- 1943US2016049903A1Self-contained, multi-fluid energy conversion and management system for converting solar energy to electric and thermal energySOLEEVA SOLAR INC·Filed 2015·Application pending·0 cites
- 2035US7105840B2Ion source for use in an ion implanterAXCELIS TECH INC·Filed 2005·Granted Sep 12, 2006·0 cites·7 claims
Join the waitlist — get patent alerts
Get an alert when Klaus Petry files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →