Inventor · disambiguated record
Klaus-Dieter Rinnen
Also filed as: RINNEN KLAUS-DIETER
6 granted patents·221 citations·filing 1996–1998
86Inventor score
Files withAPPLIED MATERIALS INC6
Top patents by PatentIndex Score
6 records- 0191US5817576AUtilization of SiH4 soak and purge in deposition processesAPPLIED MATERIALS INC·Filed 1996·Granted Oct 6, 1998·86 cites·33 claims
- 0285US5943230AComputer-implemented inter-chamber synchronization in a multiple chamber substrate processing systemAPPLIED MATERIALS INC·Filed 1996·Granted Aug 24, 1999·90 cites·39 claims
- 0365US5997950ASubstrate having uniform tungsten silicide film and method of manufactureAPPLIED MATERIALS INC·Filed 1997·Granted Dec 7, 1999·29 cites·47 claims
- 0449US5780360APurge in silicide deposition processes dichlorosilaneAPPLIED MATERIALS INC·Filed 1996·Granted Jul 14, 1998·9 cites·13 claims
- 0535US6284650B1Integrated tungsten-silicide processesAPPLIED MATERIALS INC·Filed 1997·Granted Sep 4, 2001·4 cites·17 claims
- 0635US6193813B1Utilization of SiH4 soak and purge in deposition processesAPPLIED MATERIALS INC·Filed 1998·Granted Feb 27, 2001·3 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →