Inventor · disambiguated record
Kotaro Akutsu
Also filed as: AKUTSU KOTARO
23 granted patents·2 pending applications·828 citations·filing 1990–2005
97Inventor score
Files withCANON KK25
Top patents by PatentIndex Score
25 records- 0194US6359679B1Positioning device, exposure device, and device manufacturing methodCANON KK·Filed 2000·Granted Mar 19, 2002·67 cites·48 claims
- 0293US5939852AStage feeding deviceCANON KK·Filed 1997·Granted Aug 17, 1999·60 cites·16 claims
- 0392US5184055ADevice for positioning controlCANON KK·Filed 1990·Granted Feb 2, 1993·84 cites·14 claims
- 0491US6028376APositioning apparatus and exposure apparatus using the sameCANON KK·Filed 1998·Granted Feb 22, 2000·114 cites·50 claims
- 0590US6285444B1Positioning system and position measuring method for use in exposure apparatusCANON KK·Filed 1999·Granted Sep 4, 2001·82 cites·63 claims
- 0689US7057703B2Exposure apparatusCANON KK·Filed 2005·Granted Jun 6, 2006·11 cites·7 claims
- 0788US5858587APositioning system and method and apparatus for device manufactureCANON KK·Filed 1996·Granted Jan 12, 1999·94 cites·12 claims
- 0886US5726548AMoving stage apparatus and system using the sameCANON KK·Filed 1996·Granted Mar 10, 1998·64 cites·9 claims
- 0984US5864389AStage apparatus and exposure apparatus and device producing method using the sameCANON KK·Filed 1997·Granted Jan 26, 1999·56 cites·39 claims
- 1083US7038759B2Exposure apparatusCANON KK·Filed 2002·Granted May 2, 2006·22 cites·9 claims
- 1176US7030964B2Stage system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Apr 18, 2006·17 cites·15 claims
- 1273US6879382B2Substrate processing apparatusCANON KK·Filed 2002·Granted Apr 12, 2005·12 cites·10 claims
- 1371US5382095AStatic pressure bearing deviceCANON KK·Filed 1994·Granted Jan 17, 1995·23 cites·5 claims
- 1469US6008882AStage device, method of controlling same, and exposure apparatus using said stage deviceCANON KK·Filed 1997·Granted Dec 28, 1999·28 cites·10 claims
- 1568US7057193B2Exposure apparatusCANON KK·Filed 2003·Granted Jun 6, 2006·7 cites·11 claims
- 1667US5701041AWeight supporting apparatusCANON KK·Filed 1994·Granted Dec 23, 1997·40 cites·20 claims
- 1766US6989888B2Stage system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Jan 24, 2006·8 cites·8 claims
- 1864US7123350B2Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrateCANON KK·Filed 2004·Granted Oct 17, 2006·7 cites·17 claims
- 1964US6930756B2Electron beam exposure apparatus and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Aug 16, 2005·5 cites·15 claims
- 2063US7207720B2Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Granted Apr 24, 2007·8 cites·6 claims
- 2160US7012690B2Substrate processing apparatusCANON KK·Filed 2004·Granted Mar 14, 2006·5 cites·10 claims
- 2252US7391496B2Exposure apparatusCANON KK·Filed 2005·Granted Jun 24, 2008·0 cites·3 claims
- 2349US5585627AApparatus for scanning original image having a plurality of mirrors of different natural frequenciesCANON KK·Filed 1995·Granted Dec 17, 1996·14 cites·13 claims
- 2448US2006082755A1Stage system, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Application pending·0 cites
- 2538US2005008269A1Hydrostatic bearing, alignment apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →