Inventor · disambiguated record
Koji Atoh
Also filed as: ATOH KOJI
4 granted patents·2 pending applications·102 citations·filing 2000–2003
79Inventor score
Files withEBARA CORP4
Top patents by PatentIndex Score
6 records- 0191US6643882B1Substrate cleaning apparatusEBARA CORP·Filed 2000·Granted Nov 11, 2003·64 cites·20 claims
- 0275US6560809B1Substrate cleaning apparatusEBARA CORP·Filed 2000·Granted May 13, 2003·23 cites·20 claims
- 0366US6651287B2Substrate cleaning apparatus and cleaning memberEBARA CORP·Filed 2001·Granted Nov 25, 2003·10 cites·9 claims
- 0456US6842933B2Substrate cleaning apparatus and cleaning memberEBARA CORP·Filed 2003·Granted Jan 18, 2005·5 cites·12 claims
- 0538US2002029431A1Substrate cleaning apparatusFiled 2001·Application pending·0 cites
- 0631US2002007840A1Substrate cleaning apparatus, substrate cleaning method and substrate processing apparatusFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →