Inventor · disambiguated record
Kok Heng Chew
Also filed as: CHEW KOK HENG
2 granted patents·35 citations·filing 2000–2000
62Inventor score
Files withNOVELLUS SYSTEMS INC2
Top patents by PatentIndex Score
2 records- 0173US6258653B1Silicon nitride barrier for capacitance maximization of tantalum oxide capacitorNOVELLUS SYSTEMS INC·Filed 2000·Granted Jul 10, 2001·23 cites·14 claims
- 0261US6225169B1High density plasma nitridation as diffusion barrier and interface defect densities reduction for gate dielectricNOVELLUS SYSTEMS INC·Filed 2000·Granted May 1, 2001·12 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →