Inventor · disambiguated record
Kouji Egashira
Also filed as: EGASHIRA KOUJI
3 granted patents·1 pending application·94 citations·filing 1998–2003
74Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0181US6532975B1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Mar 18, 2003·25 cites·20 claims
- 0278US6345947B1Substrate arranging apparatus and methodTOKYO ELECTRON LTD·Filed 1998·Granted Feb 12, 2002·62 cites·11 claims
- 0361US6799586B2Substrate processing methodTOKYO ELECTRON LTD·Filed 2003·Granted Oct 5, 2004·7 cites·16 claims
- 0435US2002031421A1Substrate arranging apparatus and methodTOKYO ELECTRON LTD·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →