Inventor · disambiguated record
Koji Eriguchi
Also filed as: ERIGUCHI KOJI
25 granted patents·2 pending applications·1,042 citations·filing 1994–2008
97Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD27
Top patents by PatentIndex Score
27 records- 0197US5897378AMethod of monitoring deposit in chamber, method of plasma processing, method of dry-cleaning chamber, and semiconductor manufacturing apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1998·Granted Apr 27, 1999·392 cites·23 claims
- 0291US6033928AMethod of manufacturing aggregate of semiconductor micro-needlesMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1994·Granted Mar 7, 2000·98 cites·12 claims
- 0391US5903031AMIS device, method of manufacturing the same, and method of diagnosing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted May 11, 1999·117 cites·13 claims
- 0486US6177291B1Method of making aggregate of semiconductor micro-needlesMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Jan 23, 2001·26 cites·8 claims
- 0586US6113733AApparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Sep 5, 2000·76 cites·37 claims
- 0685US6734069B2Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted May 11, 2004·34 cites·28 claims
- 0781US6087197AAggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Jul 11, 2000·44 cites·3 claims
- 0878US5650336AMethod of presuming life time of semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted Jul 22, 1997·59 cites·15 claims
- 0976US5985032ASemiconductor manufacturing apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Nov 16, 1999·45 cites·10 claims
- 1075US7432556B2Semiconductor device with dummy conductorsMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2007·Granted Oct 7, 2008·5 cites·6 claims
- 1175US6849470B1Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Feb 1, 2005·16 cites·5 claims
- 1275US6727108B2Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Apr 27, 2004·15 cites·11 claims
- 1374US6395563B1Device for manufacturing semiconductor device and method of manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted May 28, 2002·35 cites·8 claims
- 1463US6750976B2Device for manufacturing semiconductor device and method of manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Jun 15, 2004·7 cites·6 claims
- 1562US6489629B1Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Dec 3, 2002·5 cites·7 claims
- 1662US6372082B1Method and apparatus for semiconductor device fabricationMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Apr 16, 2002·7 cites·5 claims
- 1761US6695947B2Device for manufacturing semiconductor device and method of manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Feb 24, 2004·6 cites·4 claims
- 1859US6734451B2Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted May 11, 2004·6 cites·33 claims
- 1955US6580091B1Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2000·Granted Jun 17, 2003·4 cites·6 claims
- 2054US6583640B2Method and apparatus for evaluating insulating filmMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Jun 24, 2003·6 cites·5 claims
- 2152US5898207AMethod for making a semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Apr 27, 1999·13 cites·12 claims
- 2252US2009001473A1Semiconductor device and method for manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2008·Application pending·0 cites
- 2350US6720790B2Method and apparatus for evaluating insulating filmMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Apr 13, 2004·4 cites·18 claims
- 2443US6069090AMethod and apparatus for semiconductor device fabricationMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1995·Granted May 30, 2000·9 cites·9 claims
- 2542US2005006707A1Semiconductor device and method for manufacturing the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Application pending·0 cites
- 2641US6974987B2Semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Dec 13, 2005·4 cites·15 claims
- 2741US6469535B1Method for examining semiconductor substrate, and method for controlling fabrication process of semiconductor devicesMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Oct 22, 2002·9 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →