Inventor · disambiguated record
Koyu Hasegawa
Also filed as: HASEGAWA KOYU
4 granted patents·4 pending applications·19 citations·filing 2001–2018
64Inventor score
Top patents by PatentIndex Score
8 records- 0178US7059849B2Heat treatment system and a method for cooling a loading chamberTOKYO ELECTRON LTD·Filed 2001·Granted Jun 13, 2006·19 cites·5 claims
- 0259US2010000469A1Deposition apparatus for organic el and evaporating apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0354US2010071623A1Evaporating apparatusTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0450US2012001102A1Highly clean and hot valveCHIBA YASUHIRO·Filed 2009·Application pending·0 cites
- 0545US2010126417A1Deposition source unit, deposition apparatus and temperature controller of deposition source unitTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0638US10978322B2Transfer device, substrate processing apparatus, and transfer methodTOKYO ELECTRON LTD·Filed 2018·Granted Apr 13, 2021·0 cites·14 claims
- 0737US10473399B2Connection structure, magnetic annealing device using same, and connecting methodTOKYO ELECTRON LTD·Filed 2016·Granted Nov 12, 2019·0 cites·19 claims
- 0836US9939200B2Substrate transfer system and heat treatment apparatus using sameTOKYO ELECTRON LTD·Filed 2015·Granted Apr 10, 2018·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →