Inventor · disambiguated record
Koei Ito
Also filed as: ITO KOEI
3 granted patents·3 pending applications·0 citations·filing 2022–2025
44Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0171US12463021B2Substrate processing apparatus and maintenance method for substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 4, 2025·0 cites·31 claims
- 0263US12476088B2Plasma processing apparatus and inner chamberTOKYO ELECTRON LTD·Filed 2022·Granted Nov 18, 2025·0 cites·15 claims
- 0360US11791139B2Substrate supportTOKYO ELECTRON LTD·Filed 2022·Granted Oct 17, 2023·0 cites·18 claims
- 0449US2024222091A1Electrostatic chuck and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0547US2025210329A1Plasma processing apparatus, substrate processing system, and fixtureTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0640US2025201537A1Component to be used for plasma processing device, method for manufacturing component to be used for plasma processing device, and plasma processing deviceTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →