Inventor · disambiguated record
Kouzou Kawahara
Also filed as: KAWAHARA KOUZOU
3 granted patents·4 citations·filing 2015–2020
56Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0185US11862489B2Substrate processing apparatus with electronic heater powered by power feeding coilTOKYO ELECTRON LTD·Filed 2020·Granted Jan 2, 2024·2 cites·14 claims
- 0270US11510284B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Nov 22, 2022·1 cites·19 claims
- 0357US10201826B2Liquid coating method, liquid coating apparatus, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Feb 12, 2019·1 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →