Inventor · disambiguated record
Konstantin Nikolaevitch Koshelev
Also filed as: KOSHELEV KONSTANTIN N · KOSHELEV KONSTANTIN NIKOLAEVIT · KOSHELEV KONSTANTIN NIKOLAEVITCH
22 granted patents·3 pending applications·303 citations·filing 2000–2010
95Inventor score
Top patents by PatentIndex Score
25 records- 0195US6614505B2Lithographic projection apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Sep 2, 2003·99 cites·20 claims
- 0291US6452194B2Radiation source for use in lithographic projection apparatusASML NETHERLANDS BV·Filed 2000·Granted Sep 17, 2002·88 cites·23 claims
- 0373US6933510B2Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Aug 23, 2005·16 cites·25 claims
- 0472USRE41362ERadiation source, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Jun 1, 2010·3 cites·67 claims
- 0572US7061574B2Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jun 13, 2006·11 cites·26 claims
- 0668US7501642B2Radiation sourceASML NETHERLANDS BV·Filed 2005·Granted Mar 10, 2009·7 cites·21 claims
- 0767US7696492B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 13, 2010·6 cites·35 claims
- 0867US7279690B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Oct 9, 2007·2 cites·37 claims
- 0967US6667484B2Radiation source, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Dec 23, 2003·9 cites·20 claims
- 1066US7135692B2Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiationASML NETHERLANDS BV·Filed 2003·Granted Nov 14, 2006·8 cites·13 claims
- 1165US8018574B2Lithographic apparatus, radiation system and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 13, 2011·2 cites·25 claims
- 1265US7518134B2Plasma radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 14, 2009·6 cites·21 claims
- 1365US6862075B2Lithographic projection apparatus, device manufacturing method, and device manufacturing therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 1, 2005·8 cites·33 claims
- 1463US7528395B2Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 5, 2009·10 cites·42 claims
- 1562US7696493B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 13, 2010·5 cites·22 claims
- 1662US7208746B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Apr 24, 2007·9 cites·9 claims
- 1760US8362444B2Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Granted Jan 29, 2013·1 cites·26 claims
- 1860US7462851B2Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Dec 9, 2008·5 cites·18 claims
- 1958US6818912B2Radiation source, lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Nov 16, 2004·5 cites·40 claims
- 2053US7838853B2Plasma radiation source, method of forming plasma radiation, apparatus for projecting a pattern from a patterning device onto a substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Nov 23, 2010·2 cites·20 claims
- 2149US8317929B2Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatusRAKHIMOVA TATYANA VICTOROVNA·Filed 2006·Granted Nov 27, 2012·1 cites·18 claims
- 2240US2010141909A1Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 2337US7335900B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Feb 26, 2008·0 cites·9 claims
- 2436US2011043777A1Target material, a source, an euv lithographic apparatus and a device manufacturing method using the sameASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2535US2005253092A1Radiation source, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →