Inventor · disambiguated record
Koen Maria Zaal
Also filed as: MARIA ZAAL KOEN J J · MARIA ZAAL KOEN JACOBUS JOHANNES
1 granted patent·1 pending application·10 citations·filing 2005–2006
32Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0183US7830493B2System and method for compensating for radiation induced thermal distortions in a substrate or projection systemASML NETHERLANDS BV·Filed 2005·Granted Nov 9, 2010·10 cites·3 claims
- 0237US2007097346A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →