Inventor · disambiguated record
Koji Mitsuhashi
Also filed as: MITSUHASHI KOJI
4 granted patents·2 pending applications·2 citations·filing 2009–2020
59Inventor score
Top patents by PatentIndex Score
6 records- 0164US11473182B2Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the componentTOKYO ELECTRON LTD·Filed 2020·Granted Oct 18, 2022·0 cites·12 claims
- 0258US2017233860A1Manufacturing method for component in plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 0357US10808309B2Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the componentTOKYO ELECTRON LTD·Filed 2015·Granted Oct 20, 2020·0 cites·12 claims
- 0454US8999475B2Component of substrate processing apparatus and method for forming a film thereonMITSUHASHI KOJI·Filed 2009·Granted Apr 7, 2015·2 cites·20 claims
- 0553US2016076129A1Component for plasma processing apparatus, and manufacturing method thereforTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0643US9828690B2Component of substrate processing apparatus and method for forming a film thereonTOKYO ELECTRON LTD·Filed 2015·Granted Nov 28, 2017·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →