Inventor · disambiguated record
Koichiro Moriyama
Also filed as: MORIYAMA KOICHIRO
16 granted patents·8 pending applications·419 citations·filing 1996–2008
95Inventor score
Files withCANON KK22
Top patents by PatentIndex Score
24 records- 0189US7074641B2Method of forming silicon-based thin film, silicon-based thin film, and photovoltaic elementCANON KK·Filed 2002·Granted Jul 11, 2006·47 cites·12 claims
- 0289US6794275B2Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axisCANON KK·Filed 2002·Granted Sep 21, 2004·48 cites·37 claims
- 0385US6667240B2Method and apparatus for forming deposited filmCANON KK·Filed 2001·Granted Dec 23, 2003·21 cites·16 claims
- 0483US6273955B1Film forming apparatusCANON KK·Filed 1996·Granted Aug 14, 2001·58 cites·39 claims
- 0580US6447612B1Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an objectCANON KK·Filed 2000·Granted Sep 10, 2002·19 cites·27 claims
- 0678US6350489B1Deposited-film forming process and deposited-film forming apparatusCANON KK·Filed 1996·Granted Feb 26, 2002·46 cites·93 claims
- 0777US7534628B2Method for forming semiconductor device and method for forming photovoltaic deviceCANON KK·Filed 2007·Granted May 19, 2009·5 cites·12 claims
- 0875US6858087B2Vacuum-processing method using a movable cooling plate during processingCANON KK·Filed 2002·Granted Feb 22, 2005·15 cites·6 claims
- 0973US6547922B2Vacuum-processing apparatus using a movable cooling plate during processingCANON KK·Filed 2001·Granted Apr 15, 2003·13 cites·9 claims
- 1072US6576061B1Apparatus and method for processing a substrateCANON KK·Filed 1999·Granted Jun 10, 2003·39 cites·20 claims
- 1168US6338872B1Film forming methodCANON KK·Filed 1999·Granted Jan 15, 2002·29 cites·2 claims
- 1268US6031198APlasma processing method and apparatusCANON KK·Filed 1998·Granted Feb 29, 2000·21 cites·29 claims
- 1367US6261862B1Process for producing photovoltaic elementCANON KK·Filed 1999·Granted Jul 17, 2001·31 cites·7 claims
- 1463US6602347B1Apparatus and method for processing a substrateCANON KK·Filed 1999·Granted Aug 5, 2003·24 cites·45 claims
- 1561US2007169890A1Exhaust processing method, plasma processing method and plasma processing apparatusCANON KK·Filed 2007·Application pending·0 cites
- 1659US2009084500A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 1759US2009114155A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 1859US2009095420A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 1959US2009145555A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2008·Application pending·0 cites
- 2057US7211708B2Exhaust processing method, plasma processing method and plasma processing apparatusCANON KK·Filed 2001·Granted May 1, 2007·2 cites·6 claims
- 2156US2008014345A1Processing apparatus, exhaust processing process and plasma processing processCANON KK·Filed 2007·Application pending·0 cites
- 2247US6833155B2Apparatus and method for processing a substrateCANON KK·Filed 2003·Granted Dec 21, 2004·1 cites·45 claims
- 2344US2004161533A1Processing apparatus, exhaust processing process and plasma processing processFiled 2004·Application pending·0 cites
- 2430US2003164225A1Processing apparatus, exhaust processing process and plasma processingFiled 1999·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →