Inventor · disambiguated record
Kohichi Orito
Also filed as: ORITO KOHICHI
5 granted patents·3 pending applications·40 citations·filing 2009–2015
75Inventor score
Top patents by PatentIndex Score
8 records- 0196US8721790B2Film deposition apparatusKATO HITOSHI·Filed 2010·Granted May 13, 2014·23 cites·16 claims
- 0286US8746170B2Substrate process apparatus, substrate process method, and computer readable storage mediumORITO KOHICHI·Filed 2010·Granted Jun 10, 2014·14 cites·6 claims
- 0361US9416448B2Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition methodKATO HITOSHI·Filed 2009·Granted Aug 16, 2016·1 cites·27 claims
- 0457US8298341B2Removal of metal contaminant deposited on quartz member of vertical heat processing apparatusKATOH HITOSHI·Filed 2009·Granted Oct 30, 2012·2 cites·20 claims
- 0545US9580802B2Film formation method and apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2015·Granted Feb 28, 2017·0 cites·9 claims
- 0645US2011159188A1Film deposition apparatus, film deposition method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0744US2015184294A1Film deposition apparatus, film deposition method, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0844US2011048326A1Film formation apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →