Inventor · disambiguated record
Kota Shihommatsu
Also filed as: SHIHOMMATSU KOTA
1 granted patent·4 pending applications·1 citations·filing 2020–2025
16Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0177US11488807B2Plasma processing apparatus, processing method, and upper electrode structureTOKYO ELECTRON LTD·Filed 2020·Granted Nov 1, 2022·1 cites·19 claims
- 0253US2023395360A1Plasma processing apparatus, plasma processing method, pressure valve control device, pressure valve control method, and pressure regulation systemTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0350US2023207276A1Plasma processing apparatus and gas supply methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0448US2025174434A1Plasma processing apparatus and power supply systemTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0548US2025183012A1Plasma processing apparatus and electrostatic chuckTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →