Inventor · disambiguated record
Krishna Birru
Also filed as: BIRRU KRISHNA
5 granted patents·6 pending applications·24 citations·filing 2018–2023
76Inventor score
Files withLAM RES CORP11
Top patents by PatentIndex Score
11 records- 0196US11365479B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2020·Granted Jun 21, 2022·8 cites·16 claims
- 0294US12227837B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Feb 18, 2025·2 cites·19 claims
- 0394US10760158B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·14 cites·23 claims
- 0479US12163219B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Dec 10, 2024·0 cites·19 claims
- 0553US2025154652A1Layer uniformity improvement of deposition-inhibition-deposition processesLAM RES CORP·Filed 2023·Application pending·0 cites
- 0652US2025163581A1Dual plenum showerhead with center to edge tunabilityLAM RES CORP·Filed 2023·Application pending·0 cites
- 0751US2023034561A1Ammonia abatement for improved roughing pump performanceLAM RES CORP·Filed 2021·Application pending·0 cites
- 0849US2025323086A1Improved pedestals for substrate processing systemsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0947US2023130557A1Reactant gas pulse deliveryLAM RES CORP·Filed 2021·Application pending·0 cites
- 1047US2023122846A1Feature fill with nucleation inhibitionLAM RES CORP·Filed 2021·Application pending·0 cites
- 1144US12394608B2Cleaning system for removing deposits from pump in an exhaust of a substrate processing systemLAM RES CORP·Filed 2019·Granted Aug 19, 2025·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →