Inventor · disambiguated record
Kuo-Feng Pao
Also filed as: PAO KUO-FENG
2 granted patents·1 pending application·14 citations·filing 2013–2024
56Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0192US9594299B2Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Mar 14, 2017·13 cites·33 claims
- 0273US9939735B2Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 10, 2018·1 cites·20 claims
- 0363US2024142959A1Method for decoupling sources of variation related to semiconductor manufacturingASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →