Inventor · disambiguated record
Kuang-Hua Shih
Also filed as: SHIH KUANG-HUA
1 granted patent·2 pending applications·11 citations·filing 1999–2006
33Inventor score
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3 records- 0144US6197698B1Method for etching a poly-silicon layer of a semiconductor waferUNITED MICROELECTRONICS CORP·Filed 1999·Granted Mar 6, 2001·11 cites·6 claims
- 0237US2008102642A1Method of seasoning idle silicon nitride etcher and method of activatingUNITED MICROELECTRONICS CORP·Filed 2006·Application pending·0 cites
- 0328US2007082498A1Method of cleaning a waferCHEN CHIEN-HSUN·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →