Inventor · disambiguated record
Kuniaki Yamaguchi
Also filed as: YAMAGUCHI KUNIAKI
34 granted patents·11 pending applications·344 citations·filing 1997–2024
97Inventor score
Top patents by PatentIndex Score
45 records- 0195US9108292B2Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatusEBARA CORP·Filed 2014·Granted Aug 18, 2015·19 cites·26 claims
- 0294US6609962B1Dressing apparatus and polishing apparatusEBARA CORP·Filed 2000·Granted Aug 26, 2003·85 cites·23 claims
- 0393US9700988B2Substrate processing apparatusEBARA CORP·Filed 2015·Granted Jul 11, 2017·8 cites·30 claims
- 0493US9156130B2Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 13, 2015·11 cites·20 claims
- 0592US9067296B2Polishing methodONO KATSUTOSHI·Filed 2012·Granted Jun 30, 2015·14 cites·12 claims
- 0687US10201888B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 12, 2019·3 cites·20 claims
- 0783US12350787B2Substrate processing apparatusEBARA CORP·Filed 2023·Granted Jul 8, 2025·0 cites·9 claims
- 0882US6050884APolishing apparatusEBARA CORP·Filed 1997·Granted Apr 18, 2000·57 cites·13 claims
- 0979US7989348B2Polishing method and polishing apparatusEBARA CORP·Filed 2006·Granted Aug 2, 2011·6 cites·5 claims
- 1076US10688622B2Substrate processing apparatusEBARA CORP·Filed 2017·Granted Jun 23, 2020·2 cites·19 claims
- 1175US2023352326A1Substrate processing apparatus and processing methodEBARA CORP·Filed 2023·Application pending·0 cites
- 1273US8332064B2Polishing method and polishing apparatus, and program for controlling polishing apparatusTORIKOSHI TSUNEO·Filed 2006·Granted Dec 11, 2012·5 cites·11 claims
- 1373US6409582B1Polishing apparatusEBARA CORP·Filed 2000·Granted Jun 25, 2002·14 cites·6 claims
- 1473US2024308028A1Liquid supply device and polishing deviceEBARA CORP·Filed 2024·Application pending·0 cites
- 1569US10792782B2Polishing-amount simulation method for buffing, and buffing apparatusEBARA CORP·Filed 2016·Granted Oct 6, 2020·1 cites·5 claims
- 1668US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 1768US6338669B1Polishing deviceEBARA CORP·Filed 1998·Granted Jan 15, 2002·33 cites·32 claims
- 1868US2024286246A1Method of inflating elastic membrane of polishing head, and polishing head systemEBARA CORP·Filed 2024·Application pending·0 cites
- 1966US11192216B2Polishing method and polishing apparatusEBARA CORP·Filed 2018·Granted Dec 7, 2021·0 cites·6 claims
- 2066US10183374B2Buffing apparatus, and substrate processing apparatusEBARA CORP·Filed 2015·Granted Jan 22, 2019·1 cites·9 claims
- 2165US12358098B2Liquid feeder and polishing apparatusEBARA CORP·Filed 2022·Granted Jul 15, 2025·0 cites·14 claims
- 2265US5893794APolishing apparatus having robotic transport apparatusEBARA CORP·Filed 1997·Granted Apr 13, 1999·25 cites·34 claims
- 2364US2021013071A1Substrate processing apparatus and processing methodEBARA CORP·Filed 2020·Application pending·0 cites
- 2463US11731240B2Substrate processing apparatusEBARA CORP·Filed 2018·Granted Aug 22, 2023·0 cites·6 claims
- 2563US10618140B2Substrate processing system and substrate processing methodEBARA CORP·Filed 2015·Granted Apr 14, 2020·1 cites·27 claims
- 2663US6602119B1Dressing apparatusEBARA CORP·Filed 2000·Granted Aug 5, 2003·9 cites·24 claims
- 2760US6379229B1Polishing apparatusEBARA CORP·Filed 2000·Granted Apr 30, 2002·7 cites·21 claims
- 2860US2021023672A1Polishing-amount simulation method for buffing, and buffing apparatusEBARA CORP·Filed 2020·Application pending·0 cites
- 2959US2024269720A1Washing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 3059US2015140907A1Polishing method and polishing apparatusEBARA CORP·Filed 2014·Application pending·0 cites
- 3158US8592313B2Polishing method and polishing apparatusYAMAGUCHI KUNIAKI·Filed 2011·Granted Nov 26, 2013·1 cites·5 claims
- 3256US6042455APolishing apparatusEBARA CORP·Filed 1998·Granted Mar 28, 2000·20 cites·19 claims
- 3353US11541502B2Substrate processing apparatusEBARA CORP·Filed 2020·Granted Jan 3, 2023·0 cites·9 claims
- 3450US10818531B2Substrate transport system, substrate processing apparatus, hand position adjustment methodEBARA CORP·Filed 2018·Granted Oct 27, 2020·0 cites·22 claims
- 3550US6428400B1Drainage structure in polishing plantEBARA CORP·Filed 2000·Granted Aug 6, 2002·2 cites·8 claims
- 3650US2016099156A1Substrate processing apparatus and processing methodEBARA CORP·Filed 2015·Application pending·0 cites
- 3749USD795315SDresser diskEBARA CORP·Filed 2015·Granted Aug 22, 2017·5 cites·1 claims
- 3846US2025178152A1Polishing device and method for detecting polishing end point in polishing deviceEBARA CORP·Filed 2023·Application pending·0 cites
- 3944US2023381916A1Apparatus for polishing and method of polishingEBARA CORP·Filed 2023·Application pending·0 cites
- 4042US10131030B2Buffing apparatus and substrate processing apparatusEBARA CORP·Filed 2015·Granted Nov 20, 2018·0 cites·18 claims
- 4141US5961380ARobotic transport apparatusEBARA CORP·Filed 1998·Granted Oct 5, 1999·7 cites·25 claims
- 4239US6116986ADrainage structure in polishing plant and method of polishing using structureEBARA CORP·Filed 1997·Granted Sep 12, 2000·6 cites·28 claims
- 4335US2016074988A1Processing module, processing apparatus, and processing methodEBARA CORP·Filed 2015·Application pending·0 cites
- 4431US6227954B1Polishing apparatusEBARA CORP·Filed 1997·Granted May 8, 2001·1 cites·14 claims
- 4530US5944941ATurning-over machine and polishing apparatusEBARA CORP·Filed 1997·Granted Aug 31, 1999·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →