Inventor · disambiguated record
Kyoshige Katayama
Also filed as: KATAYAMA KYOSHIGE
9 granted patents·1 pending application·296 citations·filing 1998–2006
91Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0192US6190459B1Gas treatment apparatusTOKYO ELECTRON LTD·Filed 1998·Granted Feb 20, 2001·104 cites·13 claims
- 0287US6248168B1Spin coating apparatus including aging unit and solvent replacement unitTOKYO ELECTRON LTD·Filed 1998·Granted Jun 19, 2001·63 cites·12 claims
- 0385US6589339B2Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2001·Granted Jul 8, 2003·26 cites·12 claims
- 0483US6354832B1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2000·Granted Mar 12, 2002·40 cites·14 claims
- 0578US6660096B2Gas treatment apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Dec 9, 2003·17 cites·3 claims
- 0678US6524389B1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Feb 25, 2003·26 cites·6 claims
- 0776US6808567B2Gas treatment apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Oct 26, 2004·14 cites·4 claims
- 0864US6726775B2Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2003·Granted Apr 27, 2004·6 cites·6 claims
- 0953US2006292298A1Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1044US7205024B2Method of coating film, coating unit, aging unit, solvent replacement unit, and apparatus for coating filmTOKYO ELECTRON LTD·Filed 2004·Granted Apr 17, 2007·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →