Inventor · disambiguated record
Kyo Tsuboi
Also filed as: TSUBOI KYO
7 granted patents·1 pending application·187 citations·filing 1997–2023
84Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD8
Top patents by PatentIndex Score
8 records- 0196US7033444B1Plasma processing apparatus, and electrode structure and table structure of processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Apr 25, 2006·129 cites·20 claims
- 0282US7554095B2Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrateTOKYO ELECTRON LTD·Filed 2007·Granted Jun 30, 2009·7 cites·6 claims
- 0379US11538668B2Mounting stage, substrate processing device, and edge ringTOKYO ELECTRON LTD·Filed 2019·Granted Dec 27, 2022·2 cites·10 claims
- 0478US7521687B2Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrateTOKYO ELECTRON LTD·Filed 2006·Granted Apr 21, 2009·5 cites·19 claims
- 0570US5956837AMethod of detaching object to be processed from electrostatic chuckTOKYO ELECTRON LTD·Filed 1997·Granted Sep 28, 1999·44 cites·9 claims
- 0664US2023326724A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0752US7550739B2Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrateTOKYO ELECTRON LTD·Filed 2006·Granted Jun 23, 2009·0 cites·19 claims
- 0851US11715630B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 1, 2023·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →