Inventor · disambiguated record
L. David Bollinger
Also filed as: BOLLINGER L D · BOLLINGER L DAVID
6 granted patents·680 citations·filing 1991–1996
88Inventor score
Top patents by PatentIndex Score
6 records- 0196US5290382AMethods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and filmsHUGHES AIRCRAFT CO·Filed 1991·Granted Mar 1, 1994·418 cites·8 claims
- 0288US5336355AMethods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and filmsHUGHES AIRCRAFT CO·Filed 1991·Granted Aug 9, 1994·65 cites·11 claims
- 0386US5238532AMethod and apparatus for removal of subsurface damage in semiconductor materials by plasma etchingHUGHES AIRCRAFT CO·Filed 1992·Granted Aug 24, 1993·52 cites·27 claims
- 0483US5254830ASystem for removing material from semiconductor wafers using a contained plasmaHUGHES AIRCRAFT CO·Filed 1991·Granted Oct 19, 1993·79 cites·18 claims
- 0575US5291415AMethod to determine tool paths for thinning and correcting errors in thickness profiles of filmsHUGHES AIRCRAFT CO·Filed 1991·Granted Mar 1, 1994·61 cites·27 claims
- 0634US6379490B1System for improving the total thickness variation of a waferSPEEDFAM IPEC CORP·Filed 1996·Granted Apr 30, 2002·5 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →