Inventor · disambiguated record

Lawrence C. Lane

Also filed as: LANE LAWRENCE C

3 granted patents·192 citations·filing 1995–1996

79Inventor score

Technology areasH10P

Files withNOVELLUS SYSTEMS INC3

Top patents by PatentIndex Score

3 records

0189US5882417AApparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1996·Granted Mar 16, 1999·90 cites·2 claims
0281US5843233AExclusion guard and gas-based substrate protection for chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1995·Granted Dec 1, 1998·51 cites·13 claims
0380US5769951AExclusion guard and gas-based substrate protection for chemical vapor deposition apparatusNOVELLUS SYSTEMS INC·Filed 1996·Granted Jun 23, 1998·51 cites·8 claims

Join the waitlist — get patent alerts

Get an alert when Lawrence C. Lane files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →