Inventor · disambiguated record
Lakshmikanth Krishnamurthy Shirahatti
Also filed as: SHIRAHATTI LAKSHMIKANTH KRISHNAMURTHY
3 granted patents·10 pending applications·2 citations·filing 2020–2024
53Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC13
Top patents by PatentIndex Score
13 records- 0186US11610799B2Electrostatic chuck having a heating and chucking capabilitiesAPPLIED MATERIALS INC·Filed 2020·Granted Mar 21, 2023·2 cites·20 claims
- 0279US12381101B2Semiconductor process equipmentAPPLIED MATERIALS INC·Filed 2023·Granted Aug 5, 2025·0 cites·19 claims
- 0373US2025069915A1Substrate degas stationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0473US2025069914A1Substrate degas stationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0554US11646217B2Transfer apparatus and substrate-supporting memberAPPLIED MATERIALS INC·Filed 2021·Granted May 9, 2023·0 cites·14 claims
- 0654US2025250677A1Achieving wafer backside pressure by shared gas controllerAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0750US2023088457A1Energy efficiency improvement with continuous flow modulation in cluster toolAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0848US2023032146A1Simultaneous in process metrology for cluster tool architectureAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0947US2023116153A1System for uniform temperature control of cluster platformsAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1044US2022051918A1Transfer chamber with integrated substrate pre-process chamberAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1143US2022076981A1Sealing device for a pedestal assemblyAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1242US2022068690A1Substrate transfer devicesAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1342US2021375650A1High temperature and vacuum isolation processing mini-environmentsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →