Inventor · disambiguated record
Lars Stiblert
Also filed as: STIBLERT LARS · STIBLERT LARS B
13 granted patents·2 pending applications·1,033 citations·filing 1980–2011
94Inventor score
Top patents by PatentIndex Score
15 records- 0198US5631171AMethod and instrument for detection of change of thickness or refractive index for a thin film substrateBIOSTAR INC·Filed 1995·Granted May 20, 1997·420 cites·14 claims
- 0295US8160351B2Method and apparatus for mura detection and metrologySANDSTROEM TORBJOERN·Filed 2008·Granted Apr 17, 2012·31 cites·14 claims
- 0395US5494829ADevices and methods for detection of an analyte based upon light interferenceBIOSTAR INC·Filed 1993·Granted Feb 27, 1996·144 cites·14 claims
- 0494US8122846B2Platforms, apparatuses, systems and methods for processing and analyzing substratesSTIBLERT LARS·Filed 2007·Granted Feb 28, 2012·55 cites·22 claims
- 0592US4647207AEllipsometric method and apparatusSAGAX INSTR AB·Filed 1985·Granted Mar 3, 1987·137 cites·25 claims
- 0688US4558012AMethod and member for detecting and/or measuring the concentration of a chemical substanceSAGAX INSTR AB·Filed 1983·Granted Dec 10, 1985·89 cites·28 claims
- 0788US4332476AMethod and apparatus for studying surface propertiesSTENBERG JOHAN E·Filed 1980·Granted Jun 1, 1982·74 cites·19 claims
- 0881US4655595AEllipsometric method and apparatus for studying physical properties of the surface of a testpieceSAGAX INSTR AB·Filed 1985·Granted Apr 7, 1987·55 cites·22 claims
- 0979US6948254B2Method for calibration of a metrology stageMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Sep 27, 2005·18 cites·15 claims
- 1067US8822879B2Writing apparatuses and methodsSTIBLERT LARS·Filed 2010·Granted Sep 2, 2014·1 cites·14 claims
- 1160US7912671B2Method for measuring the position of a mark in a deflector systemMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Mar 22, 2011·3 cites·14 claims
- 1256US7148971B2Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surfaceMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Dec 12, 2006·6 cites·36 claims
- 1346US2011307211A1Method For Measuring The Position Of A Mark In A Deflector SystemSTIBLERT LARS·Filed 2011·Application pending·0 cites
- 1441US2005088664A1Method for writing a pattern on a surface intended for use in exposure equipment and for measuring the physical properties of the surfaceFiled 2003·Application pending·0 cites
- 1531US7365829B2Method and apparatus for image formationMICRONIC LASER SYSTEMS AB·Filed 2002·Granted Apr 29, 2008·0 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →