Inventor · disambiguated record
Lewis C. Barnett
Also filed as: BARNETT LEWIS C
2 granted patents·50 citations·filing 1995–2004
65Inventor score
Top patents by PatentIndex Score
2 records- 0180US7169234B2Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holderASM INC·Filed 2004·Granted Jan 30, 2007·27 cites·23 claims
- 0263US5573566AMethod of making a quartz dome reactor chamberADVANCED SEMICONDUCTOR MAT·Filed 1995·Granted Nov 12, 1996·23 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →