Inventor · disambiguated record
Leonid Belau
Also filed as: Belau Leonid
6 granted patents·5 pending applications·32 citations·filing 2016–2025
75Inventor score
Technology areasH10P
Files withLAM RES CORP11
Top patents by PatentIndex Score
11 records- 0195US9673058B1Method for etching features in dielectric layersLAM RES CORP·Filed 2016·Granted Jun 6, 2017·24 cites·17 claims
- 0289US10847374B2Method for etching features in a stackLAM RES CORP·Filed 2017·Granted Nov 24, 2020·8 cites·13 claims
- 0381US2025364233A1Methods and Systems for Managing Byproduct Material Accumulation During Plasma-Based Semiconductor Wafer Fabrication ProcessLAM RES CORP·Filed 2025·Application pending·0 cites
- 0455US12406852B2Profile optimization for high aspect ratio memory using an etch front metal catalystLAM RES CORP·Filed 2021·Granted Sep 2, 2025·0 cites·18 claims
- 0554US12412736B2Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication processLAM RES CORP·Filed 2018·Granted Sep 9, 2025·0 cites·18 claims
- 0653US12354880B2High aspect ratio etch with infinite selectivityLAM RES CORP·Filed 2021·Granted Jul 8, 2025·0 cites·15 claims
- 0753US2024420964A1Strip with bevel cleaningLAM RES CORP·Filed 2022·Application pending·0 cites
- 0848US12488992B2High aspect ratio dielectric etch with chlorineLAM RES CORP·Filed 2021·Granted Dec 2, 2025·0 cites·17 claims
- 0945US2023128551A1Edge ring for localized delivery of tuning gasLAM RES CORP·Filed 2021·Application pending·0 cites
- 1041US2020194234A1Vacuum chamber opening systemLAM RES CORP·Filed 2018·Application pending·0 cites
- 1137US2019157051A1Method for cleaning chamberLAM RES CORP·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →