Inventor · disambiguated record
Lee Chen
Also filed as: CHEN LEE · CHEN LEE-JEN · CHEN LEE-YUAN
13 granted patents·1 pending application·1,188 citations·filing 1983–2018
95Inventor score
Top patents by PatentIndex Score
14 records- 0196US4602981AMonitoring technique for plasma etchingIBM·Filed 1985·Granted Jul 29, 1986·76 cites·5 claims
- 0296US4534816ASingle wafer plasma etch reactorIBM·Filed 1984·Granted Aug 13, 1985·458 cites·14 claims
- 0396US4493745AOptical emission spectroscopy end point detection in plasma etchingIBM·Filed 1984·Granted Jan 15, 1985·106 cites·7 claims
- 0493US4490211ALaser induced chemical etching of metals with excimer lasersIBM·Filed 1984·Granted Dec 25, 1984·73 cites·10 claims
- 0593US4478677ALaser induced dry etching of vias in glass with non-contact maskingIBM·Filed 1983·Granted Oct 23, 1984·73 cites·21 claims
- 0692US5468955ANeutral beam apparatus for in-situ production of reactants and kinetic energy transferIBM·Filed 1994·Granted Nov 21, 1995·108 cites·20 claims
- 0789US4671849AMethod for control of etch profileIBM·Filed 1985·Granted Jun 9, 1987·93 cites·3 claims
- 0886US4490210ALaser induced dry chemical etching of metalsIBM·Filed 1984·Granted Dec 25, 1984·38 cites·23 claims
- 0984US4741799AAnisotropic silicon etching in fluorinated plasmaIBM·Filed 1986·Granted May 3, 1988·65 cites·7 claims
- 1081US4511430AControl of etch rate ratio of SiO2 /photoresist for quartz planarization etch back processIBM·Filed 1984·Granted Apr 16, 1985·45 cites·6 claims
- 1164US5286331ASupersonic molecular beam etching of surfacesIBM·Filed 1991·Granted Feb 15, 1994·31 cites·4 claims
- 1257US5423940ASupersonic molecular beam etching of surfacesIBM·Filed 1993·Granted Jun 13, 1995·22 cites·21 claims
- 1340US10262869B2Planarization methodUNITED MICROELECTRONICS CORP·Filed 2018·Granted Apr 16, 2019·0 cites·12 claims
- 1437US2005054214A1Method for mitigating chemical vapor deposition phosphorus doping oxide surface induced defectsFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →