Inventor · disambiguated record

Lee Haen

Also filed as: HAEN LEE

2 granted patents·59 citations·filing 2005–2009

66Inventor score

Technology areasH10P

Files withASM INC1 GOODMAN MATT G1

Top patents by PatentIndex Score

2 records

0195US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
0286US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →