Inventor · disambiguated record
Leslie Michael Lea
Also filed as: LEA LESLIE MICHAEL
13 granted patents·4 pending applications·485 citations·filing 1997–2020
93Inventor score
Files withSURFACE TECHNOLOGY SYSTEMS PLC8PLASMA THERM LLC4SURFACE TECHNOLOGY SYSTEMS LTD3OXFORD INSTR NANOTECHNOLOGY TOOLS LTD1
Top patents by PatentIndex Score
17 records- 0193US6187685B1Method and apparatus for etching a substrateSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1999·Granted Feb 13, 2001·235 cites·19 claims
- 0284US9412566B2Methods and apparatus for depositing and/or etching material on a substrateOXFORD INSTR NANOTECHNOLOGY TOOLS LTD·Filed 2013·Granted Aug 9, 2016·7 cites·27 claims
- 0382US11747494B2Ion filter using aperture plate with plurality of zonesPLASMA THERM LLC·Filed 2020·Granted Sep 5, 2023·1 cites·17 claims
- 0481US6602433B1Gas delivery systemSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Aug 5, 2003·31 cites·13 claims
- 0581US6458239B1Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 1997·Granted Oct 1, 2002·31 cites·17 claims
- 0678US7491649B2Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2005·Granted Feb 17, 2009·6 cites·3 claims
- 0778US6602384B2Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2001·Granted Aug 5, 2003·11 cites·6 claims
- 0878US6239404B1Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1998·Granted May 29, 2001·39 cites·8 claims
- 0976US6534922B2Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2001·Granted Mar 18, 2003·31 cites·7 claims
- 1073US6259209B1Plasma processing apparatus with coils in dielectric windowsSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1997·Granted Jul 10, 2001·61 cites·14 claims
- 1171US7306745B1Method and apparatus for stabilizing a plasmaSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Dec 11, 2007·17 cites·35 claims
- 1270US6929784B1Chlorotrifuorine gas generator systemSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Aug 16, 2005·15 cites·5 claims
- 1351US2018143332A1Ion FilterPLASMA THERM LLC·Filed 2017·Application pending·0 cites
- 1447US2009139658A1Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2007·Application pending·0 cites
- 1545US2021391150A1Plasma Source ConfigurationPLASMA THERM LLC·Filed 2020·Application pending·0 cites
- 1642US10943825B2Method for dicing die attach filmPLASMA THERM LLC·Filed 2019·Granted Mar 9, 2021·0 cites·5 claims
- 1736US2002185226A1Plasma processing apparatusFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →