Inventor · disambiguated record
Lien-Sheng Chung
Also filed as: CHUNG LIEN-SHENG
5 granted patents·1 pending application·17 citations·filing 1997–2016
74Inventor score
Top patents by PatentIndex Score
6 records- 0176US9490181B2Misalignment/alignment compensation method, semiconductor lithography system, and method of semiconductor patterningHUANG TIAN-XING·Filed 2014·Granted Nov 8, 2016·4 cites·16 claims
- 0273US7413848B2Method of removing photoresist and photoresist rework methodUNITED MICROELECTRONICS CORP·Filed 2005·Granted Aug 19, 2008·5 cites·16 claims
- 0344US10186443B2Misalignment/alignment compensation method, semiconductor lithography system, and method of semiconductor patterningHUANG TIAN XING·Filed 2016·Granted Jan 22, 2019·0 cites·9 claims
- 0443US6248178B1Method for removing pad nodulesUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jun 19, 2001·2 cites·9 claims
- 0537US2014205180A1Method, apparatus and device for inspecting circuit pattern defectHUANG TIAN XING·Filed 2014·Application pending·0 cites
- 0631US5932376APhase-shifting mask structureUNITED MICROELECTRONICS CORP·Filed 1997·Granted Aug 3, 1999·6 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →