Inventor · disambiguated record
Li Diao
Also filed as: DIAO LI
4 granted patents·15 citations·filing 2007–2019
70Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0181US9396963B2Mask removal process strategy for vertical NAND deviceMATTSON TECH INC·Filed 2014·Granted Jul 19, 2016·7 cites·21 claims
- 0277US10431469B2Method for high aspect ratio photoresist removal in pure reducing plasmaMATTSON TECH INC·Filed 2013·Granted Oct 1, 2019·5 cites·9 claims
- 0362US8093157B2Advanced processing technique and system for preserving tungsten in a device structureDIAO LI·Filed 2007·Granted Jan 10, 2012·3 cites·14 claims
- 0452US11107693B2Method for high aspect ratio photoresist removal in pure reducing plasmaBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →