Inventor · disambiguated record
Li Fu
Also filed as: FU LI · FU LI MING
6 granted patents·4 pending applications·82 citations·filing 1997–2021
84Inventor score
Files withAPPLIED MATERIALS INC5ADVANCED MICRO FAB EQUIP INC2ACCELINK TECH CO LTD1INST OF MICROELECTRONICS1
Top patents by PatentIndex Score
10 records- 0194US7658800B2Gas distribution assembly for use in a semiconductor work piece processing reactorADVANCED MICRO FAB EQUIP INC·Filed 2006·Granted Feb 9, 2010·28 cites·21 claims
- 0281US7335266B2Method of forming a controlled and uniform lightly phosphorous doped silicon filmAPPLIED MATERIALS INC·Filed 2005·Granted Feb 26, 2008·7 cites·6 claims
- 0380US6559039B2Doped silicon deposition process in resistively heated single wafer chamberAPPLIED MATERIALS INC·Filed 2001·Granted May 6, 2003·23 cites·41 claims
- 0462US6982214B2Method of forming a controlled and uniform lightly phosphorous doped silicon filmAPPLIED MATERIALS INC·Filed 2002·Granted Jan 3, 2006·7 cites·15 claims
- 0561US6991999B2Bi-layer silicon film and method of fabricationAPPLIED MATERIALS INC·Filed 2001·Granted Jan 31, 2006·11 cites·20 claims
- 0649US2007166459A1Assembly and method for delivering a reactant material onto a substrateADVANCED MICRO FAB EQUIP INC·Filed 2006·Application pending·0 cites
- 0743US2024264474A1Optical waveguide device and manufacturing method thereofACCELINK TECH CO LTD·Filed 2021·Application pending·0 cites
- 0838US2003207547A1Silicon deposition process in resistively heated single wafer chamberFiled 2003·Application pending·0 cites
- 0933US5991044AMethod and apparatus for determining characteristics of microstructures utilizing micro-modulation reflectance spectrometryINST OF MICROELECTRONICS·Filed 1997·Granted Nov 23, 1999·6 cites·19 claims
- 1033US2004009680A1Seedless method of forming a silicon germanium layer on a gate dielectric layerAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →