Inventor · disambiguated record
Lingling Pu
Also filed as: PU LINGLING
14 granted patents·15 pending applications·16 citations·filing 2016–2025
86Inventor score
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29 records- 0195US11126089B2Method for determining corrections to features of a maskASML NETHERLANDS BV·Filed 2020·Granted Sep 21, 2021·5 cites·20 claims
- 0292US11216938B2Systems and methods of optimal metrology guidanceASML NETHERLANDS BV·Filed 2019·Granted Jan 4, 2022·9 cites·15 claims
- 0381US11527405B2In-die metrology methods and systems for process controlASML NETHERLANDS BV·Filed 2019·Granted Dec 13, 2022·2 cites·15 claims
- 0477US2025006456A1Cross-talk cancellation in multiple charged-particle beam inspectionASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0575US2025078478A1Fully automated sem sampling system for e-beam image enhancementASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0674US12230013B2Fully automated SEM sampling system for e-beam image enhancementASML NETHERLANDS BV·Filed 2023·Granted Feb 18, 2025·0 cites·20 claims
- 0773US12040187B2In-die metrology methods and systems for process controlASML NETHERLANDS BV·Filed 2022·Granted Jul 16, 2024·0 cites·15 claims
- 0873US2025166960A1Sem image enhancement methods and systemsASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0970US11842420B2Method and apparatus for adaptive alignmentASML NETHERLANDS BV·Filed 2022·Granted Dec 12, 2023·0 cites·20 claims
- 1069US2025226174A1System and method for defect inspection using voltage contrast in a charged particle systemASML NETHERLANDS BV·Filed 2025·Application pending·0 cites
- 1168US11756187B2Systems and methods of optimal metrology guidanceASML NETHERLANDS BV·Filed 2022·Granted Sep 12, 2023·0 cites·20 claims
- 1267US12191112B2System and method for defect inspection using voltage contrast in a charged particle systemASML NETHERLANDS BV·Filed 2020·Granted Jan 7, 2025·0 cites·15 claims
- 1365US12080513B2Cross-talk cancellation in multiple charged-particle beam inspectionASML NETHERLANDS BV·Filed 2020·Granted Sep 3, 2024·0 cites·15 claims
- 1459US11308635B2Method and apparatus for adaptive alignmentASML NETHERLANDS BV·Filed 2019·Granted Apr 19, 2022·0 cites·15 claims
- 1558US12505974B2Systems and methods for focusing charged—particle beamsASML NETHERLANDS BV·Filed 2019·Granted Dec 23, 2025·0 cites·16 claims
- 1658US2025102923A1A framework for condition tuning and image processing for metrology applicationsASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1756US11769317B2Fully automated SEM sampling system for e-beam image enhancementASML NETHERLANDS BV·Filed 2019·Granted Sep 26, 2023·0 cites·16 claims
- 1854US2025003899A1Method and system of image analysis and critical dimension matching for charged-particle inspection apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 1952US11694312B2Image enhancement for multi-layered structure in charged-particle beam inspectionASML NETHERLANDS BV·Filed 2021·Granted Jul 4, 2023·0 cites·15 claims
- 2052US2020018944A1Sem image enhancement methods and systemsASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 2151US2025166161A1Methods and systems for improving wafer defect classification nuisance rateASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2251US2025104210A1Method and system of defect detection for inspection sample based on machine learning modelASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2349US2024331132A1Method and system for anomaly-based defect inspectionASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2447US2024331115A1Image distortion correction in charged particle inspectionASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2546US2022319805A1Self-referencing health monitoring system for multi-beam sem toolsASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 2646US2024062362A1Machine learning-based systems and methods for generating synthetic defect images for wafer inspectionASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2745US2025005739A1Systems and methods for defect detection and defect location identification in a charged particle systemASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2845US2023117237A1Contour extraction method from inspection image in multiple charged-particle beam inspectionASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2941US9884888B2Chemical regeneration method of oxidized coenzyme NAD (P)+NANJING TECH UNIV CN·Filed 2016·Granted Feb 6, 2018·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →