Inventor · disambiguated record
Lin Sha
Also filed as: SHA LIN
5 granted patents·1 pending application·39 citations·filing 2001–2013
77Inventor score
Top patents by PatentIndex Score
6 records- 0180US6845292B2Transfer apparatus and method for semiconductor process and semiconductor processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Jan 18, 2005·27 cites·20 claims
- 0270US9224794B2Embedded memory device having MIM capacitor formed in excavated structureINTEL CORP·Filed 2013·Granted Dec 29, 2015·1 cites·6 claims
- 0366US7927959B2Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded MIM capacitor using same, and embedded memory device produced therebyINTEL CORP·Filed 2008·Granted Apr 19, 2011·3 cites·15 claims
- 0463US8441057B2Embedded memory device having MIM capacitor formed in excavated structureKEATING STEVEN J·Filed 2011·Granted May 14, 2013·1 cites·7 claims
- 0554US7029505B2Sheet type heat treating apparatus and method for processing semiconductorsTOKYO ELECTRON LTD·Filed 2001·Granted Apr 18, 2006·7 cites·14 claims
- 0647US2008152812A1Methods of corrosion prevention and cleaning of copper structuresFANG MING·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →