Inventor · disambiguated record
Liang Szuma
Also filed as: SZUMA LIANG
6 granted patents·117 citations·filing 1996–1999
85Inventor score
Files withTAIWAN SEMICONDUCTOR MFG6
Top patents by PatentIndex Score
6 records- 0175US5824457AUse of WEE (wafer edge exposure) to prevent polyimide contaminationTAIWAN SEMICONDUCTOR MFG·Filed 1996·Granted Oct 20, 1998·45 cites·23 claims
- 0255US6184123B1Method to prevent delamination of spin-on-glass and plasma nitride layers using ion implantationTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Feb 6, 2001·20 cites·20 claims
- 0354US5858846ASalicide integration methodTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jan 12, 1999·16 cites·22 claims
- 0445US6214441B1Use of wee (water edge exposure) to prevent polyimideTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Apr 10, 2001·11 cites·3 claims
- 0545US5926728AMethod for fabricating tungsten polycide contactsTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jul 20, 1999·10 cites·19 claims
- 0644US5924001AIon implantation for preventing polycide voidTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Jul 13, 1999·15 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →