Inventor · disambiguated record
Lihui Wen
Also filed as: WEN LIHUI
2 granted patents·2 citations·filing 2011–2019
34Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0160US10287686B2Hot plate and substrate processing equipment using the sameZHAO MENGXIN·Filed 2011·Granted May 14, 2019·2 cites·15 claims
- 0236US11107706B2Gas phase etching device and gas phase etching apparatusBEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →