Inventor · disambiguated record
Lily Zheng
Also filed as: ZHENG LILY
4 granted patents·16 citations·filing 1999–2016
71Inventor score
Top patents by PatentIndex Score
4 records- 0181US9865472B2Fabrication of a silicon structure and deep silicon etch with profile controlLAM RES CORP·Filed 2016·Granted Jan 9, 2018·3 cites·13 claims
- 0275US9330926B2Fabrication of a silicon structure and deep silicon etch with profile controlCHEBI ROBERT·Filed 2008·Granted May 3, 2016·7 cites·32 claims
- 0349US7534363B2Method for providing uniform removal of organic materialLAM RES CORP·Filed 2004·Granted May 19, 2009·3 cites·13 claims
- 0429US6462349B1Measuring spacing between two surfaces via evanescent couplingTERASTOR CORP·Filed 1999·Granted Oct 8, 2002·3 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →