Inventor · disambiguated record
Louis N. Koppel
Also filed as: KOPPEL LOUIS N
8 granted patents·591 citations·filing 1995–2004
91Inventor score
Top patents by PatentIndex Score
8 records- 0196US6643354B2Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2002·Granted Nov 4, 2003·78 cites·26 claims
- 0296US6453006B1Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2000·Granted Sep 17, 2002·93 cites·19 claims
- 0394US5619548AX-ray thickness gaugeORYX INSTR AND MATERIALS CORP·Filed 1995·Granted Apr 8, 1997·252 cites·31 claims
- 0492US6987832B2Calibration and alignment of X-ray reflectometric systemsKLA TENCOR TECH CORP·Filed 2004·Granted Jan 17, 2006·39 cites·17 claims
- 0592US6507634B1System and method for X-ray reflectometry measurement of low density filmsTHERMA WAVE INC·Filed 2002·Granted Jan 14, 2003·61 cites·20 claims
- 0690US6768785B2Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2003·Granted Jul 27, 2004·32 cites·10 claims
- 0788US6744850B2X-ray reflectance measurement system with adjustable resolutionTHERMA WAVE INC·Filed 2001·Granted Jun 1, 2004·35 cites·33 claims
- 0847US6770886B1Detector-shield assembly for X-ray reflectometric systemTHERMA WAVE INC·Filed 2001·Granted Aug 3, 2004·1 cites·41 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →