Inventor · disambiguated record
Lokesh Subramany
Also filed as: SUBRAMANY LOKESH
5 granted patents·2 pending applications·9 citations·filing 2013–2015
70Inventor score
Top patents by PatentIndex Score
7 records- 0183US9121890B2Planar metrology pad adjacent a set of fins of a fin field effect transistor deviceGLOBALFOUNDRIES INC·Filed 2013·Granted Sep 1, 2015·5 cites·15 claims
- 0277US9129905B2Planar metrology pad adjacent a set of fins of a fin field effect transistor deviceGLOBALFOUNDRIES INC·Filed 2013·Granted Sep 8, 2015·3 cites·15 claims
- 0362US9177873B2Systems and methods for fabricating semiconductor device structuresGLOBALFOUNDRIES INC·Filed 2013·Granted Nov 3, 2015·1 cites·18 claims
- 0450US10121711B2Planar metrology pad adjacent a set of fins of a fin field effect transistor deviceGLOBALFOUNDRIES INC·Filed 2015·Granted Nov 6, 2018·0 cites·13 claims
- 0545US9281249B2Decoupling measurement of layer thicknesses of a plurality of layers of a circuit structureGLOBALFOUNDRIES INC·Filed 2014·Granted Mar 8, 2016·0 cites·22 claims
- 0645US2015348913A1Planar metrology pad adjacent a set of fins in a fin field effect transistor deviceGLOBALFOUNDRIES INC·Filed 2015·Application pending·0 cites
- 0738US2014211175A1Enhancing resolution in lithographic processes using high refractive index fluidsGLOBAL FOUNDRIES INC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →