Inventor · disambiguated record
Lutz Brekerbohm
Also filed as: BREKERBOHM LUTZ
0 granted patents·6 pending applications·0 citations·filing 2024–2025
Files withZEISS CARL SMT GMBH6
Top patents by PatentIndex Score
6 records- 0176US2025298324A1Method and device for mask inspectionZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0262US2024298082A1Peltier module, assembly, and apparatus for mask inspectionZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0356US2024295828A1Method and measuring device for inspecting photomasks, and euv cameraZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0455US2024353757A1Measurement apparatus and method for inspecting photomasks intended for euv microlithographyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0554US2025175589A1Test system for a camera, mask inspections system and method for testing a cameraZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0647US2024353768A1Measuring device and method for inspecting photomasks intended for euv microlithographyZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →