Inventor · disambiguated record
Lun Tsuei
Also filed as: TSUEI LUN
6 granted patents·10 pending applications·355 citations·filing 2002–2017
87Inventor score
Top patents by PatentIndex Score
16 records- 0196US6946033B2Heated gas distribution plate for a processing chamberAPPLIED MATERIALS INC·Filed 2002·Granted Sep 20, 2005·227 cites·17 claims
- 0295US10738928B2Manifold assemblySPM FLOW CONTROL INC·Filed 2017·Granted Aug 11, 2020·33 cites·17 claims
- 0395US9568138B2Manifold assemblySPM FLOW CONTROL INC·Filed 2014·Granted Feb 14, 2017·52 cites·15 claims
- 0490US9714465B2Gas distribution blocker apparatusTSUEI LUN·Filed 2009·Granted Jul 25, 2017·30 cites·18 claims
- 0580US8333842B2Apparatus for etching semiconductor wafersLUBOMIRSKY DMITRY·Filed 2008·Granted Dec 18, 2012·7 cites·18 claims
- 0674US7806383B2Slit valveAPPLIED MATERIALS INC·Filed 2007·Granted Oct 5, 2010·6 cites·16 claims
- 0759US2010104754A1Multiple gas feed apparatus and methodAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0859US2010112212A1Adjustable gas distribution apparatusAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0955US2010071210A1Methods for fabricating faceplate of semiconductor apparatusAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1049US2010151127A1Apparatus and method for preventing process system contaminationAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 1147US2006162661A1Mixing energized and non-energized gases for silicon nitride depositionAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1247US2012009803A1Mixing Energized and Non-Energized Gases for Silicon Nitride DepositionJUNG KEE BUM·Filed 2011·Application pending·0 cites
- 1346US2009120584A1Counter-balanced substrate supportAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 1441US2004052969A1Methods for operating a chemical vapor deposition chamber using a heated gas distribution plateAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 1540US2005126484A1Edge flow faceplate for improvement of CVD film propertiesAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 1636US2009000550A1Manifold assemblyAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →