Inventor · disambiguated record
M. J. Francois Chandrasekar Dassapa
Also filed as: DASSAPA M J FRANCOIS CHANDRASE
2 granted patents·44 citations·filing 1998–2001
65Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0174US6562187B2Methods and apparatus for determining an etch endpoint in a plasma processing systemLAM RES CORP·Filed 2001·Granted May 13, 2003·16 cites·24 claims
- 0266US6228278B1Methods and apparatus for determining an etch endpoint in a plasma processing systemLAM RES CORP·Filed 1998·Granted May 8, 2001·28 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →