Inventor · disambiguated record
Masaaki Aoyama
Also filed as: AOYAMA MASAAKI
23 granted patents·904 citations·filing 1983–2001
97Inventor score
Top patents by PatentIndex Score
23 records- 0195US5785729AMethod for manufacturing large-sized quartz glass tubeHERAEUS QUARZGLAS·Filed 1997·Granted Jul 28, 1998·70 cites·4 claims
- 0295US4935046AManufacture of a quartz glass vessel for the growth of single crystal semiconductorSHINETSU HANDOTAI KK·Filed 1988·Granted Jun 19, 1990·91 cites·10 claims
- 0392US5324012AHolding apparatus for holding an article such as a semiconductor waferNIKON CORP·Filed 1992·Granted Jun 28, 1994·149 cites·18 claims
- 0492US4956208AManufacture of a quartz glass vessel for the growth of single crystal semiconductorSHINETSU HANDOTAI KK·Filed 1989·Granted Sep 11, 1990·79 cites·4 claims
- 0587US5194743ADevice for positioning circular semiconductor wafersNIKON CORP·Filed 1991·Granted Mar 16, 1993·118 cites·16 claims
- 0687US4650335AComparison type dimension measuring method and apparatus using a laser beam in a microscope systemASAHI OPTICAL CO LTD·Filed 1983·Granted Mar 17, 1987·49 cites·5 claims
- 0786US6707528B1Exposure apparatus having independent chambers and methods of making the sameNIKON CORP·Filed 1999·Granted Mar 16, 2004·27 cites·35 claims
- 0883US5837334ALarge sized quartz glass tube, large scale quartz glass preform, process for manufacturing the same and quartz glass optical fiberHERAEUS QUARZGLAS·Filed 1996·Granted Nov 17, 1998·44 cites·3 claims
- 0983US5559582AExposure apparatusNIKON CORP·Filed 1994·Granted Sep 24, 1996·41 cites·34 claims
- 1076US4900939ASystem for processing and conveying substrateNIKON CORP·Filed 1988·Granted Feb 13, 1990·45 cites·7 claims
- 1174US6559485B2Semiconductor device having a gate insulation film resistant to dielectric breakdownFUJITSU LTD·Filed 2000·Granted May 6, 2003·21 cites·8 claims
- 1269US5651827ASingle-wafer heat-treatment apparatus and method of manufacturing reactor vessel used for sameHERAEUS QUARZGLAS·Filed 1996·Granted Jul 29, 1997·36 cites·11 claims
- 1367US6376388B1Dry etching with reduced damage to MOS deviceFUJITSU LTD·Filed 1997·Granted Apr 23, 2002·29 cites·41 claims
- 1464US4625103AAutomatic focusing device in microscope systemASAHI OPTICAL CO LTD·Filed 1983·Granted Nov 25, 1986·22 cites·6 claims
- 1559US6697145B1Substrate processing apparatus for coating photoresist on a substrate and forming a predetermined pattern on a substrate by exposureNIKON CORP·Filed 1995·Granted Feb 24, 2004·24 cites·5 claims
- 1653US6884670B2Dry etching with reduced damage to MOS deviceFUJITSU VLSI LTD·Filed 2001·Granted Apr 26, 2005·3 cites·6 claims
- 1750US5218461AScanning optical apparatusASAHI OPTICAL CO LTD·Filed 1990·Granted Jun 8, 1993·14 cites·15 claims
- 1841US5299050AScanning optical systemASAHI OPTICAL CO LTD·Filed 1992·Granted Mar 29, 1994·7 cites·22 claims
- 1940US5780257AMethod and reagent for detecting peroxidase or hydrogen peroxideYAMAGATA TECHNOPOLIS FOUND·Filed 1996·Granted Jul 14, 1998·12 cites·8 claims
- 2039US6044850ASemiconductor device manufacturing method including ashing processFUJITSU LTD·Filed 1997·Granted Apr 4, 2000·9 cites·21 claims
- 2138US6713492B1N-acyloxylated cycloalkyl compounds, composition containing the same and methods of use thereforDAIICHI RADIOISOTOPE LAB·Filed 1999·Granted Mar 30, 2004·4 cites·23 claims
- 2237US5452119AScanning optical systemASAHI OPTICAL CO LTD·Filed 1993·Granted Sep 19, 1995·5 cites·19 claims
- 2325US4696905AMethod for diagnosing cancer using ESRSPECIAL REFERENCE LAB INC·Filed 1984·Granted Sep 29, 1987·5 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →