Inventor · disambiguated record
Masashi Arasawa
Also filed as: ARASAWA MASASHI
5 granted patents·316 citations·filing 1993–1998
86Inventor score
Top patents by PatentIndex Score
5 records- 0194US5547539APlasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 1994·Granted Aug 20, 1996·100 cites·17 claims
- 0293US5622593APlasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 1996·Granted Apr 22, 1997·80 cites·18 claims
- 0384US5445709AAnisotropic etching method and apparatusHITACHI LTD·Filed 1993·Granted Aug 29, 1995·84 cites·15 claims
- 0467US5766498AAnisotropic etching method and apparatusHITACHI LTD·Filed 1996·Granted Jun 16, 1998·31 cites·23 claims
- 0565USRE36810EPlasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 1998·Granted Aug 8, 2000·21 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →