Inventor · disambiguated record
Martin Burkhardt
Also filed as: BURKHARDT MARTIN
22 granted patents·8 pending applications·441 citations·filing 1996–2022
96Inventor score
Top patents by PatentIndex Score
30 records- 0198US9551924B2Structure and method for fixing phase effects on EUV maskIBM·Filed 2015·Granted Jan 24, 2017·26 cites·20 claims
- 0297US10621302B2Classification and localization of hotspots in integrated physical design layoutsIBM·Filed 2018·Granted Apr 14, 2020·9 cites·17 claims
- 0394US10539881B1Generation of hotspot-containing physical design layout patternsIBM·Filed 2018·Granted Jan 21, 2020·15 cites·20 claims
- 0494US10012898B2EUV mask for monitoring focus in EUV lithographyIBM·Filed 2017·Granted Jul 3, 2018·4 cites·7 claims
- 0593US6232445B1Soluble MHC complexes and methods of use thereofSUNOL MOLECULAR CORP·Filed 1997·Granted May 15, 2001·110 cites·20 claims
- 0693US5869270ASingle chain MHC complexes and uses thereofSUNOL MOLECULAR CORP·Filed 1996·Granted Feb 9, 1999·95 cites·38 claims
- 0792US10706200B2Generative adversarial networks for generating physical design layout patterns of integrated multi-layersIBM·Filed 2018·Granted Jul 7, 2020·9 cites·25 claims
- 0891US11301748B2Automatic feature extraction from aerial images for test pattern sampling and pattern coverage inspection for lithographyIBM·Filed 2018·Granted Apr 12, 2022·11 cites·20 claims
- 0990US7141656B2MHC complexes and uses thereofALTOR BIOSCIENCE CORP·Filed 2001·Granted Nov 28, 2006·32 cites·28 claims
- 1089US10699055B2Generative adversarial networks for generating physical design layout patternsIBM·Filed 2018·Granted Jun 30, 2020·9 cites·25 claims
- 1189US9588440B2Method for monitoring focus in EUV lithographyIBM·Filed 2015·Granted Mar 7, 2017·3 cites·11 claims
- 1289US6940583B2Method and apparatus for amplitude filtering in the frequency plane of a lithographic projection systemINFINEON TECHNOLOGIES CORP·Filed 2003·Granted Sep 6, 2005·28 cites·20 claims
- 1385US6964032B2Pitch-based subresolution assist feature designIBM·Filed 2003·Granted Nov 8, 2005·26 cites·20 claims
- 1483US7074905B2Soluble MHC complexes and methods of use thereofALTOR BIOSCIENCE CORP·Filed 2001·Granted Jul 11, 2006·17 cites·19 claims
- 1583US6309645B1MHC molecules and uses thereofSUNOL MOLECULAR CORP·Filed 1998·Granted Oct 30, 2001·44 cites·18 claims
- 1674US9058997B2Process of multiple exposures with spin castable filmsBURKHARDT MARTIN·Filed 2012·Granted Jun 16, 2015·3 cites·19 claims
- 1761US9921466B2Method for monitoring focus in EUV lithographyIBM·Filed 2017·Granted Mar 20, 2018·0 cites·7 claims
- 1858US10868254B2Phosphorescent OLED and hole transporting materials for phosphorescent OLEDSNOVALED GMBH·Filed 2019·Granted Dec 15, 2020·0 cites·10 claims
- 1958US10243146B2Phosphorescent OLED and hole transporting materials for phosphorescent OLEDsNOVALED GMBH·Filed 2013·Granted Mar 26, 2019·0 cites·14 claims
- 2057US2023280644A1Method of making euv mask with an absorber layerIBM·Filed 2022·Application pending·0 cites
- 2155US2023087777A1Machine learning system designs for patterning models with online and/or decentralized dataIBM·Filed 2021·Application pending·0 cites
- 2254US2008320435A1Optical proximity correction improvement by fracturing after pre-optical proximity correctionIBM·Filed 2008·Application pending·0 cites
- 2353US2009104566A1Process of multiple exposures with spin castable filmIBM·Filed 2007·Application pending·0 cites
- 2450US2013181267A1Wafer fill patterns and usesIBM·Filed 2013·Application pending·0 cites
- 2550US2008168419A1Optical proximity correction improvement by fracturing after pre-optical proximity correctionIBM·Filed 2007·Application pending·0 cites
- 2649US8927198B2Method to print contact holes at high resolutionIBM·Filed 2013·Granted Jan 6, 2015·0 cites·25 claims
- 2746US8507346B2Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layerBURKHARDT MARTIN·Filed 2010·Granted Aug 13, 2013·0 cites·4 claims
- 2838US2004253632A1Modulation of T -cell receptor interactionsSUNOL MOLECULAR CORP·Filed 2001·Application pending·0 cites
- 2936US9261793B2Image optimization using pupil filters in projecting printing systems with fixed or restricted illumination angular distributionMCINTYRE GREGORY R·Filed 2012·Granted Feb 16, 2016·0 cites·20 claims
- 3034US2017110668A1Polychromatic Light Emitting Devices and Versatile Hole Transporting Matrix for ThemNOVALED GMBH·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →