Inventor · disambiguated record
Marcus Carbery
Also filed as: CARBERY MARCUS
3 granted patents·1 pending application·75 citations·filing 2004–2020
67Inventor score
Top patents by PatentIndex Score
4 records- 0189US7062411B2Method for process control of semiconductor manufacturing equipmentSCIENT SYSTEMS RES LTD·Filed 2004·Granted Jun 13, 2006·71 cites·10 claims
- 0274US7113842B2Method for transferring process control models between plasma processing chambersSCIENT SYSTEMS RES LTD·Filed 2005·Granted Sep 26, 2006·4 cites·12 claims
- 0344US2022243323A1Use of rotation to correct for azimuthal non-uniformities in semiconductor substrate processingLAM RES CORP·Filed 2020·Application pending·0 cites
- 0433US9864361B2Flexible temperature compensation systems and methods for substrate processing systemsLAM RES CORP·Filed 2015·Granted Jan 9, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →