Inventor · disambiguated record
Mahendra Chhabra
Also filed as: CHHABRA MAHENDRA
4 granted patents·2 pending applications·19 citations·filing 2010–2016
72Inventor score
Top patents by PatentIndex Score
6 records- 0188US9506145B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2016·Granted Nov 29, 2016·3 cites·20 claims
- 0288US9364871B2Method and hardware for cleaning UV chambersAPPLIED MATERIALS INC·Filed 2013·Granted Jun 14, 2016·4 cites·11 claims
- 0387US8753449B2Enhancement in UV curing efficiency using oxygen-doped purge for ultra low-K dielectric filmAPPLIED MATERIALS INC·Filed 2013·Granted Jun 17, 2014·9 cites·17 claims
- 0479US9659765B2Enhancement of modulus and hardness for UV-cured ultra low-k dielectric filmsAPPLIED MATERIALS INC·Filed 2015·Granted May 23, 2017·3 cites·15 claims
- 0543US2015368803A1Uv curing process to improve mechanical strength and throughput on low-k dielectric filmsAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 0636US2012121823A1Process for lowering adhesion layer thickness and improving damage resistance for thin ultra low-k dielectric filmCHHABRA MAHENDRA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →