Inventor · disambiguated record
Matthew Claussen
Also filed as: CLAUSSEN MATTHEW
1 granted patent·1 pending application·0 citations·filing 2020–2025
14Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0166US2025279298A1Rf immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing systemLAM RES CORP·Filed 2025·Application pending·0 cites
- 0257US12308265B2RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing systemLAM RES CORP·Filed 2020·Granted May 20, 2025·0 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →